High Purity Alumina Ceramic with Volume Resistivity of 10 4 Ohm*cm for Semiconductor Applications

High Purity Alumina Ceramic with Volume Resistivity of 10 4 Ohm*cm for Semiconductor Applications

This series of semiconductor-specific alumina ceramic components are manufactured using 99.6% ultra-high purity Al₂O₃ material through precision tape casting and high-temperature sintering processes. The products exhibit excellent insulation, corrosion resistance, and dimensional stability, meeting SEMI Standard F47 cleanliness requirements.

Primary Semiconductor Applications

• Wafer fabrication: Etching machine ceramic parts, diffusion boats

• Packaging & testing: Probe card substrates, test sockets

• Equipment components: Robot end effectors

• Vacuum systems: Electrostatic chuck bases

• Optical inspection: Lithography machine ceramic guides

Product Advantages

✓ Ultra-clean: Metal ion content <0.1ppm
✓ Precision dimensions: Tolerance ±0.05mm/100mm
✓ Plasma resistance: Etching rate <0.1μm/h
✓ Low outgassing: TML<0.1% CVCM<0.01%
✓ High reliability: Passes 1000 thermal cycles

Technical Specifications

Semiconductor Manufacturing Process

1. Material preparation:

   • Nano-grade Al₂O₃ powder (D50≤0.5μm)

   • High-purity ball milling (Y₂O₃-MgO sintering aids)

2. Forming process:

   • Tape casting (thickness 0.1-5mm)

   • Isostatic pressing (200MPa)

3. Sintering control:

   • Multi-stage atmosphere sintering (1600°C/H₂)

   • HIP post-treatment (1500°C/150MPa)

4. Precision machining:

   • Laser processing (±5μm)

   • Ultrasonic drilling (aspect ratio 10:1)

5. Cleaning & inspection:

   • Megasonic cleaning (Class 1 cleanroom)

   • SEMI F47 particle testing

Usage Guidelines

⚠️ Storage: Class 100 clean packaging
⚠️ Installation environment: 23±1°C RH45±5%
⚠️ Cleaning: Semiconductor-grade solvents only
⚠️ Handling: Avoid direct contact with functional surfaces

Semiconductor Services

• Cleanliness verification: VDA19 test reports

• Failure analysis: SEM/EDS microanalysis

• Custom development: DFM co-design

FAQ

Q: How to ensure wafer contact surface cleanliness?
A: Triple protection:
① Plasma surface activation
② Vacuum packaging + N₂ storage
③ Pre-installation ionized air cleaning

Q: Performance in fluorine-based plasma?
A: Special treated version:
• Etching rate <0.05μm/h
• AlF₃ passivation layer
• 3x longer lifespan

Q: Maximum processable size?
A: Standard 200×200mm, special process up to 400×400mm.

We are a company with many years of experience in the production of special precision ceramics and the ability to design, manufacture, process and sell structural and functional parts of various special precision ceramics.

Deyu Precision Ceramics Technology Co., Ltd. has many years of experience in producing special precision ceramics, and has the ability to design, manufacture, process and sell structural and functional parts of various special precision ceramics. At present, the company has production and processing equipment such as dry press, isostatic press, experimental furnace, flat kiln, machining center, surface grinder, universal internal and external grinder, centerless grinder and laser cutting machine, as well as complete high-precision testing equipment such as high-precision projector, three-dimensional tester, metallographic microscope, hardness tester and densitometer.

With advanced production technology and complete production facilities, the company is one of the few domestic enterprises that can produce special precision ceramic structural parts and functional parts with machining accuracy less than 2 microns, and has strong core competitiveness in the same industry in China.

Advantages of the company: 1. National new technology enterprises; 2. The company has a municipal R&D center; 3. Cooperation with domestic key universities and research institutes; 4. Design, molding, sintering and precision processing; 5. The products cover alumina, zirconia, silicon nitride, silicon carbide and other precision ceramics; 6. Precision plus technology.

The company has always been standing in the position of customers to solve problems, focusing on the principle of quality and delivery time, adhering to the business philosophy of "integrity, innovation and reassurance", and sincerely looking forward to cooperating with you.