4H N Type SiC (Silicon Carbide) Wafer, Production Grade,Epi Ready,2”Size

Brand Name:PAM-XIAMEN
Minimum Order Quantity:1-10,000pcs
Delivery Time:5-50 working days
Payment Terms:T/T
Place of Origin:China
Price:By Case
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Location: Xiamen Fujian China
Address: #506B, Henghui Business Center, No.77, Lingxia Nan Road, High Technology Zone, Huli, Xiamen 361006, China
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4H N Type SiC (Silicon Carbide) Wafer, Production Grade,Epi Ready,2”Size


PAM-XIAMEN offers semiconductor silicon carbide wafers,6H SiC and 4H SiC in different quality grades for researcher and industry manufacturers. We has developed SiC crystal growth technology and SiC crystal wafer processing technology,established a production line to manufacturer SiCsubstrate,Which is applied in GaNepitaxydevice,powerdevices,high-temperature device and optoelectronic Devices. As a professional company invested by the leading manufacturers from the fields of advanced and high-tech material research and state institutes and China’s Semiconductor Lab,weare devoted to continuously improve the quality of currently substrates and develop large size substrates.

Here shows detail specification:


SILICON CARBIDE MATERIAL PROPERTIES


PolytypeSingle Crystal 4HSingle Crystal 6H
Lattice Parametersa=3.076 Åa=3.073 Å
c=10.053 Åc=15.117 Å
Stacking SequenceABCBABCACB
Band-gap3.26 eV3.03 eV
Density3.21 · 103 kg/m33.21 · 103 kg/m3
Therm. Expansion Coefficient4-5×10-6/K4-5×10-6/K
Refraction Indexno = 2.719no = 2.707
ne = 2.777ne = 2.755
Dielectric Constant9.69.66
Thermal Conductivity490 W/mK490 W/mK
Break-Down Electrical Field2-4 · 108 V/m2-4 · 108 V/m
Saturation Drift Velocity2.0 · 105 m/s2.0 · 105 m/s
Electron Mobility800 cm2/V·S400 cm2/V·S
hole Mobility115 cm2/V·S90 cm2/V·S
Mohs Hardness~9~9

4H N Type SiC Wafer, Production Grade,Epi Ready,2”Size


SUBSTRATE PROPERTYS4H-51-N-PWAM-330 S4H-51-N-PWAM-430
DescriptionProduction Grade 4H SiC Substrate
Polytype4H
Diameter(50.8 ± 0.38) mm
Thickness(250 ± 25) μm (330 ± 25) μm (430 ± 25) μm
Carrier Typen-type
DopantNitrogen
Resistivity (RT)0.012 – 0.0028 Ω·cm
Surface Roughness< 0.5 nm (Si-face CMP Epi-ready); <1 nm (C- face Optical polish)
FWHM<30 arcsec <50 arcsec
Micropipe DensityA+≤1cm-2 A≤10cm-2 B≤30cm-2 C≤50cm-2 D≤100cm-2
Surface Orientation
On axis<0001>± 0.5°
Off axis4°or 8° toward <11-20>± 0.5°
Primary flat orientationParallel {1-100} ± 5°
Primary flat length16.00 ± 1.70) mm
Secondary flat orientationSi-face:90° cw. from orientation flat ± 5°
C-face:90° ccw. from orientation flat ± 5°
Secondary flat length8.00 ± 1.70 mm
Surface FinishSingle or double face polished
PackagingSingle wafer box or multi wafer box
Usable area≥ 90 %
Edge exclusion1 mm

Why is the most device designed in 4H SiC Wafer?

For 4H SiC and 6h SiC, the vertical devices on C(0001) wafer are considered in bfom calculation. Because of the high critical electric field intensity and electron mobility along the c axis, the bfom of 4H SiC is significantly higher than that of other SiC polymorphs, which is why 4H SiC is almost completely used in power application. Another advantage of 4H SiC is that its ionization energy of donor and acceptor is smaller than that of other SiC polymorphs. In addition, the availability of 4H SiC (0001) single crystal wafer with relatively large diameter and reasonable quality promotes the manufacturing of electronic devices based on 4H SiC. Currently the characteristics of commercial 4H SiC Power Devices (Schottky barrier diodes and field effect transistors) have been better than the theoretical limits of 3C SiC and 6H iC.


SiC crystal application

Many researchers know the general SiCapplication:III-V Nitride Deposition;OptoelectronicDevices;High Power Devices;High Temperature Devices;High Frequency Power Devices.But few people knows detail applications, We list some detail application and make some explanations.

Detail Application of Silicon Carbide

Because of SiC physical and electronic properties,silicon carbide based device are well suitable for short wavelength optoelectronic, high temperature, radiation resistant, and high-power/high-frequency electronic devices,compared with Si and GaAs based device.

Many researchers know the general SiC application:III-V Nitride Deposition;Optoelectronic Devices;High Power Devices;High Temperature Devices;High Frequency Power Devices.But few people knows detail applications, here we list some detail application and make some explanations:

1. SiC substrate for X-ray monochromators:such as,using SiC's large d-spacing of about 15 A;

2. SiC substrate for high voltage devices;

3. SiC substrate for diamond film growth by microwave plasma-enhanced chemical vapor deposition;

4. For silicon carbide p-n diode;

5. SiC substrate for optical window: such as for very short (< 100 fs) and intense (> 100 GW/cm2) laser pulses with a wavelength of 1300 nm. It should have a low absorption coefficient and a low two photon absorption coefficient for 1300 nm.

6. SiC substrate for heat spreader: For example,the Silicon carbide crystal will be capillary bonded on a flat gain chip surface of VECSEL (Laser) to remove the generated pump heat. Therefore, the following properties are important:
1) Semi-insulating type required to prevent free carrier absorption of the laser light;

2) Double side polished are preferred;

3) Surface roughness: < 2nm, so that the surface is enough flat for bonding;

7. SiC substrate for THz system application: Normally it require THz transparency

8. SiC substrate for epitaxial graphene on SiC:Graphene epitaxy on off axis substrate and on axis are both available, surface side on C-face or Si face are both available.

9. SiC substrate for process development loke ginding, dicing and etc

10. SiC substrate for fast photo-electric switch

11. SiC substrate for heat sink: thermal conductivity and thermal expansion are concerned.

12. SiC substrate for laser: optical, surface and stranparence are concerned.

13. SiC substrate for III-V epitaxy, normally off axis substrate are required.

Xiamen Powerway Advanced Material Co.,Limited is an expert in SiC substrate, he can give researchers suggestions in different application.


Band-gap:

In solid state physics, a band gap, also called an energy gap or bandgap, is an energy range in a solid where no electron states can exist. In graphs of the electronic band structure of solids, the band gap generally refers to the energy difference (in electron volts) between the top of the valence band and the bottom of the conduction band in insulatorsand semiconductors. This is equivalent to the energy required to free an outer shell electron from its orbit about the nucleus to become a mobile charge carrier, able to move freely within the solid material. So the band gap is a major factor determining the electrical conductivity of a solid. Substances with large band gaps are generally insulators, those with smaller band gaps are semiconductors, while conductors either have very small band gaps or none, because the valence and conduction bands overlap.

SiC band-gap: 2.36eV(3C),3.23eV(4H) and 3.05eV(6H).


China 4H N Type SiC (Silicon Carbide) Wafer, Production Grade,Epi Ready,2”Size supplier

4H N Type SiC (Silicon Carbide) Wafer, Production Grade,Epi Ready,2”Size

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