1000C RTP Rapid Thermal Annealing Furnace , Halogen Light Tube Laboratory Tube Furnace

1000C RTP Rapid Annealing Furnace Halogen Light Tube Heated Vacuum Oven

Application of RTP rapid annealing furnace

This product adopts international advanced manufacturing technology, modelling is novel and reasonable structure; Has been all kinds of the validation sample experiments, and has been widely used in semiconductor device research and development and production, etc

1.To meet the rapid annealing after ion implantation;

2. Also can be used in the ohmic contact fast alloy;

3. Can also be used for annealing silicide alloy, oxide growth;

4. and copper indium gallium selenide photovoltaic applications of selenium deposits such as rapid heat treatment process

Features

SP-1100RTP compact RTP fast annealing furnace is a compact rapid heating treatment tube furnace with 4" quartz tube and vacuum flange, It is special designed for annealing semiconductor or solar cell wafer.

It is heated by 8 Pieces of 10 KW halogen light tube around the chamber. The heating rate can up to max. 50C/second. 51 segments precision temperature controller is built with accuracy +/-1° C. you can control the furnace and monitoring the temperature curve by RS485 plug port and control software .

Standard parts for this tube furnace

Our Warranty :

Warranty: One year limited warranty with lifetime support, excluding heating element damaged by user.
Attention: Any damages caused by the use of corrosive and acidic gases, and any damage from wrong operate and use are not under the coverage of One Year Limited Warranty.

Company Introduction:

Henan Super Machinery Equipment Co., Ltd. is located in the central part of China-Zhengzhou City, Henan Province, with an advantageous geographical location and convenient transportation network. It is a comprehensive enterprise integrating scientific research, production, sales and service.

SUPER company's main products are various laboratory muffle furnaces, metal melting furnaces and metal heat treatment furnaces. The equipment adopts new technology, energy saving and environmental protection, and is welcomed by customers at home and abroad.

Our company actively expands overseas markets. Our products have been exported to and exported to more than 30 countries and regions such as New Zealand, the United States, France, Turkey, Pakistan, South Africa, Brazil, and Thailand. Henan Super Machinery Equipment Co., Ltd. will adhere to the "people-oriented, technology-first" business philosophy, accelerate management modernization, intelligent products and internationalized management steps, pursue excellence, be honest, take first-class quality, first-class technology, first-class Service to satisfy customers. The company is willing to accompany long-term friends from all over the world for win-win cooperation.