Product Details
Precision Ceramic Parts Semiconductor Wafer Chuck
The semiXicon porous vacuum chuck series are designed for
application of handling thin films and other flexible work pieces.
The chuck has uniform distributed pore sizes to assure desirable
sucking and holding power for very thin films ,it is widely applied
in electronic, semiconductor, ,solar,medical and optical laser
microfabrication etc industries.
We can custom design per your application to turn them into
individual working stations or integrate into your production
lines.
Ceramic material: alumina, silicon carbide
Aperture: 1~100 μm
Porosity: 30%~60%
Bending strength: >50 MPa
Processing accuracy: ±0.003 mm, flatness 0.003 mm
Product features: wear resistance, high temperature resistance,
high hardness, corrosion resistance
Available colors: beige, black
Custom processing: 6 inches, 8 inches
Applications:
Semiconductor
Thin film
Optical
Solar
MEMS
Battery
Biomedical
…
Company Profile
Henan ZG Industrial Products Co. Ltd. was founded by specialists of
leading industrial institutes in Zhengzhou city, China in 2007.
Our company manufactures, complex develops, supplies, introduces
and upgrades products from technical ceramics, heating elements and
graphite. We provide services for the manufacture, repair and
renovation of special high-temperature equipment as well. In
addition, our company provides services for R&D, analytical
research within our specialization.
We have established contacts with the world’s leading and domestic
manufacturers of ceramic and heating elements, leading industry
institutes and track all the latest trends in this field.
The introduction of ceramic and heating elements in production
requires a special study of each case, taking into account
technological and market nuances. The specialists of our company
have all the necessary experience for the most complete solution of
the customer’s problem and developing an optimal offer.
Among our customers are chemical, petrochemical, oil refining, oil
and gas, mining, mining and concentrating, paper, metallurgy,
power, electrical, electronic, glass and other industries.
We will be glad to answer all your questions.