99.8% High Purity Alumina Domes, Focus rings in DPS metal Chamber
Brand Name:ZG
Certification:CE
Model Number:MS
Minimum Order Quantity:1 piece
Delivery Time:5-8 working days
Payment Terms:L/C, D/A, D/P, T/T, Western Union, MoneyGram
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Location:
Zhengzhou Henan China
Address:
No. 26, Dongqing Street, High-tech Zone, Zhengzhou ,Henan, China
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within 48 hours
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Product Details
Company Profile
Product Details
99.8% High Purity Alumina Domes and Rings for DPS Metal Chamber
Henan ZG Industrial Ceramic established in May 2019, which is mainly engaged invarious precise ceramic material of research and development, manufacture, and sales. ZG Ceramic products are widely used in industry of semiconductor (IC), FPD, LED, new energy , etc.
People‐orientation, pursuit of excellence,science and technology
innovation, value creation, which is committed to growing as a
global famous and advanced ceramic manufacturer. ZG Ceramic core
team has rich ceramic manufacturing experience, who are brave to
explore, keep improving, pursue of excellent quality, create value
for customers, industries, and society. ZG Ceramic will always
remember original aspiration, perseverance, finally realize ZG
Ceramic's dream of being a top ceramic Chinese manufacturer.
Fields Served:
- Shadow frame, Large format plate, Shield Base, Roller & Bushing in Flat Panel Display
- Clamp Ring, Chamber Liner, Carrier (SiC) in LED manufacture
- Etch system components, CVD, PVD components, Implant components in Semi-Conductor
- Wearing components, Custom components in New Energy field
- Wearing components, Grinding & Milling (Zirconia), Custom components in Industrial Machinery
Specification:
| 特性项目 Items | 三氧化二铝 Al2O3 | ||||||||
| 材质编号 Material No. | A99 | A997 | A997LT | A998 | A999 | ||||
| 颜色 Color | 白 White | 象牙色 Ivory | 象牙色 Ivory | 象牙色 Ivory | 象牙色 Ivory | ||||
| 纯度 Purity (Wt%) | ≥99% | ≥99.7% | ≥99.7% | ≥99.8% | ≥99.9% | ||||
| 密度 Density | g/cc | ASTM-C20 | 3.8 | 3.92 | 3.92 | 3.93 | 3.94 | ||
| 吸水率 Water Absorption | % | ASTM-C373 | 0 | 0 | 0 | 0 | 0 | ||
| HV硬度 HV Hardness | GPa | ASTM C1327-03 | 15 | 17 | 16 | 18 | 18 | ||
| 抗弯强度 Flexural Strength | MPa | ASTM C1161-02 | 365 | 370 | 390 | 400 | 400 | ||
| 抗压强度 Compressive Strength | MPa | ASTM C773 | 2450 | 2500 | 2500 | 2500 | 2600 | ||
| 弹性衡量 Elastic Modulus | GPa | ASTM C1198-01 | 360 | 375 | 385 | 385 | 385 | ||
| 波松比 Poisson's Ratio | - | ASTM C1198-01 | 0.23 | 0.23 | 0.23 | 0.23 | 0.23 | ||
| 断裂韧性 Fracture Toughness | Mpa*m1/2 | ASTM C1421-01 | 3 | 4 | 4 | 4 | 4 | ||
| 膨胀系数 Thermal Expansion R.T | ×10-6/℃ R.T 400 ℃ | ASTM C372-94 | 7.2 | 8.2 | 8.2 | 8.2 | 8.2 | ||
| 热传导率 Thermal Conductivity | W/(M.K) | ASTM C408-88 | 29 | 32 | 32 | 32 | 33 | ||
| 耐热冲击 Thermal Shock Resistance | ℃ | - | 200 | 200 | 200 | 200 | 200 | ||
| 介电强度 Dielectric Strength | KV/mm | ASTM D149-97 | 15 | 15 | 15 | 16 | 18 | ||
| 体积电阻率 Volume Resistivity | Ω.cm×1014 | ASTM D257-99 (20°C) | 1 | 1 | 1 | 1 | 1 | ||
| 介电常数 Dielectric Constant | - | ASTM D150-98 (1 MHz) | 9.9 | 9.9 | 9.9 | 9.9 | 9.7 | ||
| 介电损耗 Dielectric Loss tangent | (×10-4) | ASTM D150-98 (1 MHz) | 20 | 10 | <2 | 10 | 5 | ||
| 硝酸(60%), 90°C HNO3 | WT loss mg/cm2/D | - | 0.1 | <0.05 | <0.05 | <0.05 | <0.03 | ||
| 硫酸(95%), 95°C H2SO4 | WT loss mg/cm2/D | - | 0.33 | <0.23 | <0.23 | <0.23 | <0.2 | ||
| 氢氧化钠(30%), 80°C NaOH | WT loss mg/cm2/D | - | 0.26 | <0.04 | <0.04 | <0.04 | <0.02 | ||
99.8% High Purity Alumina Domes, Focus rings in DPS metal Chamber
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