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Good Force Characteristics VARS Series Swing Voice Coil Motor Made In China
Arc voice coil motors play an important role in the semiconductor
industry, mainly focusing on precise positioning, adjustment, and
control of semiconductor manufacturing and semiconductor equipment.
The following are the important roles of arc-shaped voice coil
motors in the semiconductor industry:
1. Semiconductor manufacturing equipment: Arc voice coil motors are
widely used in semiconductor manufacturing equipment, such as
etching machines, ion implantation machines, lithography machines,
etc. These devices require high-precision position control and
motion adjustment to achieve precise manufacturing of semiconductor
chips.
2. Manipulators and robots: In semiconductor manufacturing, robotic
arms and robots are commonly used for handling and processing
semiconductor wafers. Arc-shaped voice coil motors can achieve
motion control of robotic arms and robots, ensuring accurate
handling and handling operations.
3. Welding and Packaging: During the semiconductor packaging and
welding process, it is necessary to position and align the
semiconductor chip to ensure accurate connection and packaging. The
curved voice coil motor can be used to achieve precise chip
positioning and adjustment.
4. Lithography and Mask Alignment: During the lithography and mask
alignment process, it is necessary to make minor positional
adjustments to the semiconductor wafer to ensure accurate
transmission of the lithography pattern onto the wafer. The curved
voice coil motor can be used to achieve fast and accurate position
adjustment.
5. Testing and Measurement Equipment: The semiconductor industry
requires high-precision testing and measurement equipment to verify
the quality and performance of chips. Arc-shaped voice coil motors
can be used to drive moving parts for precise measurement and
detection operations.
VARS Series of Swing type voice coil motor | ||||||||
Model | Peak torque(N-M) | Continuous torque25℃(N-M) | Maximum travel(mm) | Voltage(V) | Back EMF constant(V/m/S) | Coil weight(g) | Width*height (mm) | Length(mm) |
VARS0008-026-00A | 0.080 | 0.045 | 26.0 | 6.4 | 0.045 | 11.7 | 39.8*26.1 | 35.00 |
VARS0017-090-00A | 0.170 | 0.110 | 90.0 | 11.1 | 0.11 | 18.0 | 44*39 | 70.00 |
VARS0022-032-00A | 0.220 | 0.120 | 32.0 | 15.5 | 0.16 | 21.5 | 51.5*26 | 60.00 |
VARS0042-040-00A | 0.420 | 0.380 | 40.0 | 3.5 | 0.12 | 38.0 | 53.6*30.3 | 82.00 |
VARS0077-020-00A | 0.770 | 0.630 | 20.0 | 6.7 | 0.24 | 66.0 | 50*30 | 75.00 |
VARS0084-030-00A | 0.840 | 0.600 | 30.0 | 6.3 | 0.2 | 54.2 | 48.9*30.6 | 75.00 |
VARS0120-020-00A | 1.200 | 1.200 | 20.0 | 8.4 | 0.67 | 65.0 | 73.5*32 | 80.00 |
VARS0706-014-00A | 7.100 | 2.100 | 14.0 | 52.4 | 1.03 | 220.0 | 65*54.5 | 115.00 |
VARS4520-030-00A | 45.200 | 19.000 | 30.0 | 71.5 | 4.3 | 1300.0 | 240*78 | 240.00 |