1100C Quartz Tube Furnace With Solid Precursor Sublimator For CVD 2D Layers Of TMDs

Product Overview for Oxidation Diffustion Thermal Anealing Tube Furnace

PTC D110/440/12NG is a compact 1100°C CVD tube furnace with a precursor sublimating attachment. Totally four-channel gas inlets are built on the sublimation which allows feedings of various gases to carry the source vapor into the main heater for further decomposition and deposition. The sample holder fixture mounted on the right flange is slidable for easy sample loading/unloading.

Main Features

• Compact CVD furnace system with:
• 4.33" O.D x 4.05" I.D x 29.13" Length quartz tube ( OD 110 xID 103 x L 740, mm )
• 1100ºC Max. working temperature with +/- 1oC accuracy
• The water cooling flange on the right side is slidable for easy sample loading
• The water cooling flange on the left side between the heater and furnace is used for pre-heated gas input and sealing
• Four-channel gas inlet ( 1/8" Dia tube and tube fitting) are built-in on the left side flange
• One small heater is attached to the left side flange of the furnace to preheat input gas, liquid, or evaporate solid chemical, which will be then delivered to the CVD furnace:
• Please click the picture left for more details:
• 1.2''O.D x 6''L SS tube as the heating chamber
• Vacuum sealed 1" ID small quartz tube inside the heater ( Pic 2)
• 400ºC Max. working temperature ( 1000ºC heater is available upon request )
• The flange on the left side is for gas sealing and input

Ramping, Dwelling, Cooling Curves for 1200 Series Laboratory Furnaces

Safety Measures

• Built-in ammeter and dual voltmeters for easy monitoring and troubleshooting.
• Overheat protection shuts down the tube furnace if temperature is outside of acceptable range (refer to controller's manual) or when the thermocouple is broken or malfunctions
• Power failure protection resumes furnace operation right after the point of failure when power is reestablished
• Microprocessor based self-tuning PID control provides optimum thermal process with minimal overshoot

Product Gallery

Precursor sublimator device for CVD tube furnace

Technical Specifications

Application Notes

• Don't fill any explosive gasses such as Hydrogen or Methane into the furnace tube without necessary safety controls and supervision
• Laboratory tube furnaces with quartz tube are designed for use under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MPa
• Small cracks may appear on the surface of the refractory ceramics over extended use. This is a normal occurrence and the cracks may be repaired with alumina coating

Size Comparison

Program Thermal Tech (Luoyang) Co., Ltd, (hereinafter referred to Programtherm, owning its manufacturing plant Luoyang Pure Furnace Co., Ltd) has more than 16 years of experience in furnace heating industry, with capabilities in Designing and Manufacturing lab & Industrial Furnaces independently for various applications. Programtherm products mainly cover muffle furnaces, tube furnaces, elevator furnaces, car bottom furnaces, atmosphere furnaces, vacuum furnaces etc with Max working temperature reaches up to 1750 degree C. In addition to the mentioned wide range of standard products, our powerful engineer group also support customized services according to customers’requirements.

Programtherm is owning total manufacturing facilities of 1500 square meters and more than 30 staffs and a group of experienced engineers. 5S management system; Products have been successfully exported to more than 40 countries and regions around the world. Such as Europe, South Asia, South America, Australia, New Zealand and Africa etc. Our self-developed high-temperature heating equipment has provided great help for universities, scientific research institutions and industrial and mining enterprises.