Icp Etching Wafer Holder Silicon Carbide Sic Plate In Led Industry
Brand Name:KeGu
Model Number:Customizable
Payment Terms:L/C,D/A,D/P,T/T,Western Union,MoneyGram
Place of Origin:China
Supply Ability:2,000 pcs/month
Packaging Details:Strong wooden box for Global shipping
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Location:
Chaoyang Shaanxi China
Address:
5# Chaoyang Road,Weicheng Sub-district，Qinhan New City, Xixian New Area, Xi'an Shaanxi Province,China,712039
Supplier`s last login times:
within 25 hours
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Product Details
Silicon Carbide (sic) Trays Or Plate, As A Wafer Holder For Icp Etching Process In Led Industry
Description:
Silicon Carbide (SiC) Trays or plate used as a wafer holder for ICP etching process in LED industry.
Silicon carbide (SiC) is a has excellent thermal conductivity,
corrosion resistance, and with low thermal expansion. Silicon
carbide is an excellent material for sealing rings and bearings.
Silicon carbide trays have excellent corrosion resistance, great
wear resistance, great mechanical strength under high temperatures.
We supply many sizes of silicon carbide trays as well as other SiC
products.
Silicon Carbide Trays Properties:
| Compound Formula | SiC |
| Molecular Weight | 40.1 |
| Appearance | Black |
| Melting Point | 2,730° C (4,946° F) (decomposes) |
| Density | 3.0 to 3.2 g/cm3 |
| Electrical Resistivity | 1 to 4 10x Ω-m |
| Poisson’s Ratio | 0.15 to 0.21 |
| Specific Heat | 670 to 1180 J/kg-K |
Silicon Carbide Tray Specifications:
| Type | Recrystallized SiC | Sintered SiC | Reaction Bonded SiC |
| Purity of Silicon Carbide | 99.5% | 98% | >88% |
| Max. Working Temp. (`C) | 1650 | 1550 | 1300 |
| Bulk Density (g/cm3) | 2.7 | 3.1 | >3 |
| Appearance Porosity | <15% | 2.5 | 0.1 |
| Flexural strength (MPa) | 110 | 400 | 380 |
| Compressive strength (MPa) | >300 | 2200 | 2100 |
| Thermal expansion (10^-6/`C) | 4.6 (1200`C) | 4.0 (<500`C) | 4.4 (<500`C) |
| Thermal conductivity (W/m.K) | 35~36 | 110 | 65 |
| Main characteristics | High temp. High resistance. High purity | Fracture Toughness | Chemical Resistance |
Feature requirement:
- Excellent thermal conductivity
- Resistant to plasma shock
- Good temperature uniformity
Applications:
-Silicon carbide can be applied in areas such as semiconductor and
coating.
-Our silicon carbide trays are widely used in LED industry.
Icp Etching Wafer Holder Silicon Carbide Sic Plate In Led Industry
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