Nitrogen Atmosphere High Temperature Box Furnace Chemical Vapor Deposition CVD Furnace
Brand Name:Chitherm
Certification:ISO
Model Number:MBF100-10
Minimum Order Quantity:1
Delivery Time:Customized
Payment Terms:Customized
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Hefei Anhui China
Address:
Factory Building No.3,North Intersection of Fangxing Avenue and Yulan Avenue,Economic Development Zone,Feixi County,Hefei City,Anhui Province.
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Product Details
Nitrogen Atmosphere High Temperature Box Furnace Chemical Vapor
Deposition CVD Furnace
Product Overview
The MBF100-10 Type Chemical Vapor Deposition (CVD) Furnace is designed for medium-temperature heat treatment of electronic products and material processing. This industrial-grade furnace supports gas-phase reaction processes in nitrogen, helium, acetylene, and hydrogen atmospheres, as well as sintering processes under protective atmospheres. Equipped with a real-time computer monitoring system, it's ideal for research institutes and material process testing applications.
Technical Specifications
| Attribute | Value |
|---|---|
| Product Model | MBF100-10 |
| Rated Temperature | 750°C |
| Maximum Temperature | 1000°C |
| Heating Zone Dimensions | 770 × 770 × 300 mm (W × D × H) |
| Effective Dimensions | 640 × 640 × 250 mm (W × D × H) |
| Heating Element | FEC Ceramic Fiber Heater |
| Temperature Stability | ±1°C with PID auto-tuning |
| Control Method | Touch screen + PLC centralized control |
| Weight | Approx. 500kg |
| Furnace Dimensions | 1200×1200×1500mm (W×H×D) |
Key Features
- Advanced temperature control with 2 independent control points
- Comprehensive safety features including over-temperature alarms and power-off protection
- Low surface temperature rise (<35ºC) for safe operation
- Fused quartz inner lining for durability and thermal efficiency
- Natural cooling system integrated with furnace
- ISO certified manufacturing standards
- Customization options available
Delivery Contents
| Item | Note | Quantity |
|---|---|---|
| Furnace Unit | 1 | |
| Mass Flow Controller (MFC) | Yamatake or HORIBA | 4 |
| Touch Screen | 1 | |
| Temperature Controller | 1 | |
| FEC Heater | 1 | |
| Quartz Liner | 1 | |
| Technical Documents | Specifications and component documentation | 1 Set |
Installation Requirements
- Environment: 0-40ºC temperature, ≤80% humidity, no corrosive gases
- Floor: Level surface with >500Kg/m² bearing capacity
- Power: ≥22kVA, 3-phase 5-wire (220/380V, 50Hz)
- Space: Minimum 1500×1500×3000mm (W×H×D) installation area
Nitrogen Atmosphere High Temperature Box Furnace Chemical Vapor Deposition CVD Furnace
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