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Anti-Discoloration Coating Field Al2O3 TiO2 Magnetron Sputtering Coating Machine

Anti-Discoloration Coating Field Al2O3 TiO2 Magnetron Sputtering Coating Machine

Brand Name:ZEIT
Certification:Case by case
Model Number:MSC-ADC-X—X
Minimum Order Quantity:1set
Delivery Time:Case by case
Payment Terms:T/T
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Location: Chengdu Sichuan China
Address: CSCES strait screen and core intelligent manufacturing base,Shuangliu District,Chengdu City, Sichuan Province, P. R. China
Supplier`s last login times: within 21 hours
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Product Details

Magnetron Sputtering Deposition in Anti-discoloration Coating Field


Applications

ApplicationsSpecific PurposeMaterial Type
Anti-discoloration coatingPrecious metal anti-oxidation coatingAl2O3, TiO2


Working Principle
Electrons continuously collide with argon atoms in the motion process,ionizing a large number of argon ions to
bombard the target. After multiple collisions, the energy of electrons gradually decreases.Electrons break away
from the restriction of magnetic line of force, keep away from the target, and finally deposit on the substrate.

Features

ModelMSC-ADC-X—X
Coating typeVarious dielectric films such as metal film, metal oxide and AIN
Coating temperature rangeNormal temperature to 500℃
Coating vacuum chamber size700mm*750mm*700mm (Customizable)
Background vacuum< 5×10-7mbar
Coating thickness≥ 10nm
Thickness control precision≤ ±3%
Maximum coating size≥ 100mm (Customizable)
Film thickness uniformity≤ ±0.5%
Substrate carrierWith planetary rotation mechanism
Target material4×4 inches(compatible with 4 inches and below)
Power supplyThe power supplies such as DC, pulse, RF, IF and bias are optional
Process gasAr, N2, O2
Note: Customized production available.


Coating Sample


Process Steps
→ Place the substrate for coating into the vacuum chamber;
→ Roughly vacuumize;
→ Turn on molecular pump, vacuumize at top speed, then turn on the revolution and rotation;
→ Heating the vacuum chamber until the temperature reaches the target ;
→ Implement the constant temperature control;
→ Clean elements;
→ Revolve and back to the origin;
→ Coating film according to process requirements;
→ Lower temperature and stop the pump assembly after coating;
→ Stop working when the automatic operation is finished.

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China Anti-Discoloration Coating Field Al2O3 TiO2 Magnetron Sputtering Coating Machine supplier

Anti-Discoloration Coating Field Al2O3 TiO2 Magnetron Sputtering Coating Machine

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