KGD - MQ - 536 Infrared Gas Sensor / Infrared Gas Leak Detector for Precise Monitoring

Brand Name:KACISE
Certification:CE
Model Number:KGD-MQ-536
Minimum Order Quantity:1PCS
Delivery Time:5-8 work days
Payment Terms:L/C,D/A,D/P,T/T,Western Union,MoneyGram
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Address: i City, No11, TangYan South road, Yanta District, Xi'an,Shaanxi,China.
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Product Details

KGD - MQ - 536 Infrared Gas Sensor

Product Introduction

The KGD - MQ - 536 Infrared Gas Sensor is based on Non - Dispersive Infrared (NDIR) technology. It can accurately measure gases such as WF6, CF4, SF6, NF3, and CO2 generated in semiconductor applications. It is compatible with common pre - set dimensions, flanges, and communication protocols within equipment. It can be used for endpoint detection in semiconductor deposition and cleaning processes, as well as terminal detection for chamber cleaning, which helps reduce cleaning time, cut costs, and increase production.

Product Features

  • Adopts NDIR technology, supports multi - gas monitoring (including WF6, CF4, SF6, NF3, CO2, etc.).
  • Fast response time and high sensitivity.
  • No consumables.
  • Analog/digital communication.
  • Modular design for easy integration.

Technical Parameters

ParameterDetails
Detection PrincipleNDIR
Detected GasesWF6, CF4, SF6, NF3, CO2
Measuring Range1 - 264ppm (0 - 200mTorr)
Repeatability±0.5%
Linearity±1%F.S.
Detection Limit1ppm
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KGD - MQ - 536 Infrared Gas Sensor / Infrared Gas Leak Detector for Precise Monitoring

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