Maglev Lubrication Molecular Vacuum Pump For Chip Manufacturing

Brand Name:KYKY
Certification:CE
Model Number:CXF-200/1401E
Minimum Order Quantity:1
Delivery Time:4weeks
Payment Terms:T/T, L/C
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Location: Beijing Beijing China
Address: No. 13 Zhongguancun Bei er tiao, Haidian District, Beijing,100190
Supplier`s last login times: within 27 hours
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Product Details

Maglev Pump , CXF-200/1401 , Water cooling , On board


series magnetically levitated molecular pumps are mainly applied to fields of semiconductor manufacturing, clip manufacturing, industrial plating and scientific instruments, especially to extraction of corrosive gases existing in etch, cvd, pvd and ion implantation and gases easily coagulated at normal temperature.


The advantages:


1. Zero friction during operation, and low power consumption

2. Easy to acquire really clean high vacuum and ultrahigh vacuum without lubrication for pumps

3. Capable of extracting corrosive gases for long term

4. High safety and long service life due to protection of bearings with precision ceramic balls

5. power generating function in case of sudden power-off


Specifications:

ModelCXF-200/1401
Pump Speed(l/s,Air)1400
Compression Ratio>1×107
Ultimate Vacuum(Pa)≤2×10-6
Inlet FlangeDN200 ISO K(LF)
DN200 ISO F
DN200 ISO CF
Outlet FlangeKF 40
Rotation Speed(rpm)33000
Run-up Time(min)6
VIB (mm)<0.05
Backing Pump (L/s)15
Mounting or ientationAny
Cooling methodWater
Weight(kg)(With Controller)51
China Maglev Lubrication Molecular Vacuum Pump For Chip Manufacturing supplier

Maglev Lubrication Molecular Vacuum Pump For Chip Manufacturing

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