Maglev Lubrication Molecular Vacuum Pump For Chip Manufacturing
Brand Name:KYKY
Certification:CE
Model Number:CXF-200/1401E
Minimum Order Quantity:1
Delivery Time:4weeks
Payment Terms:T/T, L/C
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Location:
Beijing Beijing China
Address:
No. 13 Zhongguancun Bei er tiao, Haidian District, Beijing,100190
Supplier`s last login times:
within 27 hours
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Product Details
Maglev Pump , CXF-200/1401 , Water cooling , On board
series magnetically levitated molecular pumps are mainly applied to fields of semiconductor manufacturing, clip manufacturing, industrial plating and scientific instruments, especially to extraction of corrosive gases existing in etch, cvd, pvd and ion implantation and gases easily coagulated at normal temperature.
The advantages:
1. Zero friction during operation, and low power consumption
2. Easy to acquire really clean high vacuum and ultrahigh vacuum without lubrication for pumps
3. Capable of extracting corrosive gases for long term
4. High safety and long service life due to protection of bearings with precision ceramic balls
5. power generating function in case of sudden power-off
Specifications:
| Model | CXF-200/1401 |
| Pump Speed(l/s,Air) | 1400 |
| Compression Ratio | >1×107 |
| Ultimate Vacuum(Pa) | ≤2×10-6 |
| Inlet Flange | DN200 ISO K(LF) |
| DN200 ISO F | |
| DN200 ISO CF | |
| Outlet Flange | KF 40 |
| Rotation Speed(rpm) | 33000 |
| Run-up Time(min) | 6 |
| VIB (mm) | <0.05 |
| Backing Pump (L/s) | 15 |
| Mounting or ientation | Any |
| Cooling method | Water |
| Weight(kg)(With Controller) | 51 |
Maglev Lubrication Molecular Vacuum Pump For Chip Manufacturing
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