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Pump station FJ-110, Air cooling with RVP-4 and ZDF-11A2
FJ-110 Sandard Turbo Molecular Pump Unit is an cleaning equipment to
obtain high vacuum.
Such equipment is a vacuum obtaining system adopting the principle
of vacuum, and consists of mechanical pump and molecular pump. It
is featured by quick starting, high vacuum, few oil pollution, easy
operation and etc and widely used in the fields of surface
analysis, accelerator technology ,plasma technology, electric
vacuum device manufacturing and other vacuum areas. The equipment
is specifically composed of non-standard frame, mechanical pump and
pipelines , electrical control systems, water cooling protection
control and etc
Main parameters:
Ultimate vacuum (no load): ≤ 9×10-5Pa
Leaking rate of vacuum system: ≤ 5×10-9Pa·M3/S
Power supply voltage:220V±10/50Hz
Cooling mothod: air cooling (ambient temperature ≤ 25℃)
Ambient temperature for equipment utilization:5-40℃
Ambient humidity for equipment utilization: ≤ 80%
Configuration:
Name | Number |
F-100/110 molecular pump and power supply (CF) | 1 |
RVP-4 backing pump | 1 |
Control power supply | 1 |
Frame | 1 |
CF100/ CF35/CF35 transition chamber | 1 |
CD-35F manual isolation valve | 1 |
ZDF-11A2 combination vacuum gauge | 1 |
Other attachments |
Specifications:
| Unit | FJ-110 |
Flange(In) | DN100CF | |
DN100 ISO-K | ||
Flange(Out) | ISO-KF | DN25 |
Pumping Speed | l/s | N2:110 |
He:100 | ||
H2:50 | ||
Ar:100 | ||
Compression Ratio | N2:108 | |
He:102 | ||
H2:102 | ||
Ar:108 | ||
Ultimate Pressure | Pa | CF:6×10-7 |
ISO-K:6×10-6 | ||
recommended forevacuum pressure | Pa | 100 |
forevacuum pump | RVD-4(default) | |
Cooling Type,Standard | Air | |
Cooling Water Consumpyion | L/min | >1 |
Cooling Water Temperature | ℃ | ≤25 |
Input voltage/ frequency | V/Hz | 220±22/50 |
Environment temperature (℃) | ||
Air cooling | 5℃-32℃ | |
mounting position | Vertical | |
Controller Model | FD-110B | |
L*W*H | mm | 500×510×840 |
Weight | kg | 52 |