lab-grown diamond machine MPCVD equipment Diamond professional growth equipment CVD diamond growing machine manufacturer

Brand Name:BAXIT
Certification:CE
Model Number:BXT-MPCVD
Minimum Order Quantity:1(Min. Order)
Delivery Time:5-8work days
Payment Terms:L/C, T/T, D/A, D/P
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Location: Shanghai Shanghai China
Address: No.5616th, Caoan Road, Jiading District, Shanghai
Supplier`s last login times: within 38 hours
Product Details Company Profile
Product Details

Microwave generator and systemOperating frequency2450MHz
Output power0.1 ~ 6 kW continuously adjustable
Power stabilitybetter than ±1% (@ rated status)
Output waveguide interfaceBJ-26/22 with FD-26/22 standard flange
Power input380VAC/50Hz, 3-phase 5-wire, 11kW
Cooling water flow18L/min
System standing wave coefficientVSWR ≤ 1.5
Microwave leakagemeet the national standards
Microwave vacuum discharge chamberSize and working modeΦ200 x 300 (H) TM mode
Effective deposition areaΦ50mm
Pressure control range0.5KPa~30KPa
Pressure control accuracy±15Pa
Vacuum acquisitionSingle crystal growthgrowth rate of 10-15μm/H, single growth thickness ≥ 1.6mm
Single crystal qualityalmost no defects under naked eye
Vacuum systemBlowout modefill with N2
Ultimate vacuum degreebetter than8×10-4Pa
Vacuum leakage rate≤10-9pA.m3/s
Pressure rise24 hours average pressure rise is less than1Pa/H
Gas mass flow systemAccuracy2%-100%F.S.,inletpressureis0.2-0.3Mpa
Gas type and rangeH2(1SLM),CH4(100SCCM),O2(10SCCM),N2(20SCCM)
Sample stage systemSample stage diameterΦ60mm,water-cooled;
Adjustment range of sample
table
0~15mm
Cavity plate adjustment range0~60mm
Substrate temperature measurementinfrared temperature measurement
range
600~1200℃(Infrared temperature measurement)
Temperature control precisiontemperature control precision±5℃;
Control range of constant temperature areatemperature difference of each point of molybdenum platform≤30℃
Device interfaceInlet and outlet waterG1"outer wire
Gas connection1/4"VCR outer wire
Exhaust discharge interface3/4"outer wire
Power lineTB4506
Insulation resistance≥5MΩ
Reliabilitythe continuous and stable working time under normal conditions shall not be less than 24H
Total power supply380VAC±5%/50Hz,3phase5wire,13kW
Total cooling water34L/min,clean soft water,inlet water temperature is 20℃±5℃;Water pressure is 0.2~0.4MPa
Dimensions~1.95(L)x0.8(W)x1.90(H)m

China lab-grown diamond machine MPCVD equipment Diamond professional growth equipment CVD diamond growing machine manufacturer supplier

lab-grown diamond machine MPCVD equipment Diamond professional growth equipment CVD diamond growing machine manufacturer

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