PVD+PECVD Vacuum Deposition System, DLC film coating by PECVD process

Royal Technology Multi950
——PVD + PECVD Vacuum Deposition Machine

he Multi950 machine is a customized multiple function vacuum deposition system for R&D.

After intense exchanges with Shanghai University’s team lead by Professor Chen, we finally confirmed the design and configuration to fulfil their R&D applications. This system is able to deposit transparent DLC film with the PECVD process, hard coatings on tools, and optical film with sputtering cathode. Based on this pilot machine design concept, we have developed 3 other coating systems afterwards:

1. Bipolar Plate Coating for Fuel Cell Electric Vehicles- FCEV1213

2. Ceramic Direct Plated Copper- DPC1215

3. Flexible Sputtering System- Copper PCB Gold Plating System

These 3 machines all have an Octagonal chamber, which allow flexible and reliable performances in various applications. It satisfies the coating processes and requires many different metal layers: Al, Cr, Cu, Au, Ag, Ni, Sn, SS and many other non-ferromagnetic metals. Plus the Ion source unit, efficiently enhances films adhesion on different substrate materials with its plasma etching performance and, the PECVD process to deposit some carbon-based layers.

The Multi950 is the milestone of advanced design coating systems for Royal Technology. Thanks to students of Shanghai University and Professor Yigang Chen leading them with his creative and selfless dedication, were we able to convert his valuable information into a state of the art machine.

In the year 2018, we had another project cooperation with Professor Chen,
the C-60 material deposition by Inductive thermal evaporation method.
Mr. Yimou Yang and Professor Chen were fundamental for these innovative projects.

Technical Advantages

• Compact Footprint
• Standard Modular Design
• Flexible
• Reliable
• Octagonal Chamber Structure
• 2-door Structure For Easy Access
• PVD + PECVD processes

Design Features

1. Flexibility: Arc and sputtering cathodes, Ion source mounting flanges are standardized for flexible exchange

2. Versatility: It can deposit a variety of base metals and alloys; optical coatings, hard coatings, soft coatings, compound films and solid lubricating films on the metallic and non-metallic materials substrates

3. Straight forward design: 2-door structure, front & rear opening for easy maintenance

Technical Specifications

Model: Multi-950

Deposition chamber (mm)

Diameter x Height: φ950 x 1350

Deposition Sources : 1 pair of MF sputtering cathodes

1 pair of PECVD

8 sets arc cathodes

1 set Linear Ion Source

Plasma Uniformity Zone (mm): φ650 x H750

Carousel: 6 xφ300

Powers (KW) Bias: 1 x 36

MF Sputtering Power (KW): 1 x 36

PECVD (KW): 1 x36

Arc (KW): 8 x 5

Ion Source (KW): 1 x 5

Gas Control System MFC: 4 + 1

Heating System: 18KW, up to 500℃, with thermal couple PID control

High Vacuum Gate Valve: 2

Turbo molecular pump: 2 x 2000L/S

Roots Pump: 1 x 300L/S

Rotary Vanes Pump: 1 x 90 m³/h + 1 x 48 m³/h

Footprint (L x W x H ) mm: 3000 * 4000 * 3200

Total Power (KW): 150

Layout

Shanghai Royal Technology Inc. was established in 2006, a worldwide supplier of high quality vacuum equipment with key locations around the globe. Research and Development technology are supported by specialized engineers in the United States and China. High-tech machine manufacturing facilities are located in Shanghai and our global network of service centers ensure fast customer service response in key locations.

Shanghai Royal Technology has a strong drive for innovative design and high quality components selection, combined with an extra careful assembly process and a topnotch team of talented technicians and inventors, which enable us to offer turn-key coating solutions with high standard vacuum equipment, meeting and often exceeding Western standard. We are determined to serve the market worldwide in various industries such as:

Consumer electronics, automotive, renewable energy, architecture, Nano and bio-medical materials.

RTAS model,the arc and sputtering integrated series equipment can produce highly reflective black and bronze films specifically for high quality decorative coatings.

RTSP1200-FCEV, It is a sputtering system with PECVD process to deposit thin film on hydrogen fuel cell power modules. Fuel Cell Vehicles is the newest technology for the next generation of environmentally friendly cars. The main advantage and technological progress compared to commonly used batteries like dry cell need to undergo a recurring recharging process, but hydrogen fuel cell power modules only require Hydrogen and Oxygen reaction to generate power for driving.

RTSP1200-DPC,This coating system is exclusively used for the DPC (Direct Plating Copper) ceramic substrates process. The DPC ceramic substrates are widely used in various applications: for instance in high brightness LED to increase the longevity because of its high heat radiation performance, Semiconductor equipment, in microwave wireless communication, military electronics, various sensor substrates, aerospace, railway transportation, electricity power and much more.

RT-CsI950, Evaporation coating plant is applied to CsI film deposition for X-Ray Imaging devices. It is an advanced technique to evaporate CsI on the screen to create high quality images. The high-resolution performance allows this application to be extremely efficient and disruptive in the medical instrument, nuclear energy industry, security checking and inspection, high energy physics subjects and more.

Shanghai Royal Technology also successfully designed and developed Cube and Cylinder model large size Aluminum Vacuum Metalizing System which is used for Automotive Logo Board Coating.

Live Locally, Think Globally is our Vision. We live our day to day business by the concept of “Integrity and Solidarity”, always striving for innovation to achieve win-win situations in our ecosystem of worldwide partners. As pioneers in the Vacuum Coating Equipment Industry, we never relied on previous accomplishments, but we continuously tried to explore the ever changing world of the Vacuum Coating Industry to always create optimal economic, social and environmental benefits for our customers.

ROYAL TECHNOLOGY'S CULTURE

ROYAL's Vision: to be the worldwide famous brand supplier of providing total solutions to customers requirement.

ROYAL' Mission: protects the environment, saves our blue planet ; to improve labors tough working environment, enhance work efficiency, completely help owners to reduce production cost.

ROYAL's Philosophy: human-oriented, honest, innovative and make the greatest contribution to society.

ROYAL's Value: innovation, advanced technology’s R&D, serving China and worldwide's manufacturing industries.

ROYAL's Service: ONE-STOP service, with excellent technology and products, professional dedication to serve our customers.