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PECVD DLC Thin Film Vacuum Coating Equipment, Graphite sputtering deposition system

PECVD DLC Thin Film Vacuum Coating Equipment, Graphite sputtering deposition system

Brand Name:ROYAL
Certification:CE
Model Number:RTSP
Minimum Order Quantity:1 set
Delivery Time:12 weeks
Payment Terms:L/C, T/T
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Address: 819# SONGWEI ROAD (N.) SONGJIANG INDUSTRIAL ZONE, SHANG HAI, CHINA 201613
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Product Details

DLC Thin Film Vacuum Coating Equipment, Ion Source PECVD to Generate Diamond Like Carbon Coating System


DLC film ( Diamond - Like - Carbon), it has been benefiting variety of industries for high end quality products like: automotive bearings, medical instruments, military, aerospace, industrial sealing parts, watches, etc. which require high durability and min. coefficient of friction.


PECVD + PVD process DLC coating technique has been developed by us for years to satisfy the highest standard application. This process providing an unique and flawless finishing on the product surface except extrodiary beauty.


DLC Thin Film Coating Machine Specifications


MODELRTSP1010
TECHNOLOGYPECVD process- magnetron sputtering + ion source
CHAMBER MATERIALStainless Steel (S304)
CHAMBER SIZEΦ1000*1000mm (H)
CHAMBER TYPERegular octahedron chamber, 2-doors
ROTATION RACK & JIG SYSTEM6 (8)satellite, Max. weight: 400kgs
POWER SUPPLIESQty. of Sputtering: 2*24 KW Bias of Power Supply: 1*24W AE power supply for option Ion Source Power supply 2 sets, AE power supply for option
DEPOSITION MATERIALCr/C
DEPOSITION SOURCE

2 pairs (4 pieces) Sputtering Cathodes + 2 Ion Source Coating Area: Dia800mm*H550mm;

Uniformity Area: ±10~15%

CONTROLPLC(Programmable Logic Controller) + Touch Screen ( manual+ auto+ semi-auto operation models)
PUMP SYSTEMRotary Vane Pump: SV300B - 1 set (Leybold)
Roots Pump: WAU1001 - 1 set (Leybold)
Holding Pump: D60C-1set- (Leybold)
Magnetric Rotor Suspension Molecular Pump: MAG2200 - 2 sets (Leybold)
GAS MASS FLOW CONTROLLER3 channels, Made in America (MKS brand)
VACUUM GAUGEModel: ZDF-X-LE, Made in China
Linear Ion Source2 pieces Pre-treating, plasma cleaning + assisted deposition
SAFETY SYSTEMNumerous safety interlocks to protect operators and equipment
HEATINGHeaters: 20KW. Max. temp.: 400℃
COOLINGIndustrial Chiller (Cold Water)
POWER MAX.100KW (Approx.)
AVERAGE POWER CONSUMPTION45 KW (Approx.)
GROSS WEIGHTT (Approx.)
FOOT PRINT( L*W*H) 4000*4000 *4000 MM
POWER ELECTRICALAC 380V/3 phases/50HZ


Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.

China PECVD DLC Thin Film Vacuum Coating Equipment, Graphite sputtering deposition system supplier

PECVD DLC Thin Film Vacuum Coating Equipment, Graphite sputtering deposition system

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