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SiC Fuel Cell Module Thin Film Deposition Equipment , PECVD Magnetron Sputtering Equipment

SiC Fuel Cell Module Thin Film Deposition Equipment , PECVD Magnetron Sputtering Equipment

Brand Name:ROYAL
Certification:CE certification
Model Number:RTSP1213-DC
Minimum Order Quantity:1 set
Delivery Time:16 weeks
Payment Terms:L/C, D/A, D/P, T/T
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Address: 819# SONGWEI ROAD (N.) SONGJIANG INDUSTRIAL ZONE, SHANG HAI, CHINA 201613
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SiC Fuel Cell Module PECVD Sputtering System / Hydrogen Fuel Cell Magnetron Sputtering Coating Equipment


SiC Fuel Cell Module Sputtering System Specifications


MODELRTSP1213-DC
MATERIALStainless Steel (S304)
CHAMBER SIZEΦ1250 * 1350mm (H)
CHAMBER TYPEFront and back 2 - doors structure, Vertical
SINGLE PUMP PACKAGERotary Piston Vacuum Pump
Roots Vacuum Pump
Magnetic Suspension Molecular Pump
Rotary Vane Pump (Holding Pump)
TECHNOLOGYMagnetron Sputtering, Ion Source PECVD
POWER SUPPLYSputtering power supply + Bias Power supply + Ion Source
DEPOSITION SOURCE2 pairs DC/RF Sputtering Cathodes + (2 pairs spare using) + Ion Source
CONTROLPLC+Touch Screen
GASGas Mass Flow Meters ( Ar, N2, C2H2, O2) Argon, Nitrogen and Ethyne,Oxygen
SAFETY SYSTEMNumerous safety interlocks to protect operators and equipment
COOLINGCooling Water
CLEANINGGlow Discharge/Ion Source
POWER MAX.150KW
AVERAGE POWER CONSUMPTION75KW

The SiC Fuel Cell Module Sputtering System is exclusively designed and developed for FCV vechiles application. FCV is the short name of Fuel Cell Vehicle, it is the newest technology for next generation of green cars. It can generate electrical energy continuously by electrochemical reaction between oxygen and hydrogen. It is different from the primary battery such as dry cell and rechargeable battery that needs to repeat charging.

The core technology is how to generate the electrical energy with fuel cell power module through electrochemical reaction between hydrogen as fuel and oxygen.

Hydrogen fuel cell as the most key important part of the power module, scientists, engineers, professors from transportation organizations and worldwide vehicles manufactures have made thousands tests and finally found the proper processing.

Hydrogen Fuel Cell Power Module Sputtering System with the PECVD (Plasma Enhanced Chemical Vapor Deposition) Technology to deposit high uniformity, strong adhesion SiC thin films.

The Hydrogen fuel cell sputtering machine contains ion source, balanced/unblanced sputtering cathodes; with stable and large volume vacuum pumping system.

The special designed rack and jig system can take out-move in completely for a substrates convenient loading/unloading.



Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.

China SiC Fuel Cell Module Thin Film Deposition Equipment , PECVD Magnetron Sputtering Equipment supplier

SiC Fuel Cell Module Thin Film Deposition Equipment , PECVD Magnetron Sputtering Equipment

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