NEW Photoresist Flow Meter IC Components SLQ-QT105
Brand Name:hkshanhai
Certification:CE,Rohs
Model Number:SLQ-QT105
Minimum Order Quantity:5pcs
Delivery Time:3-7days
Payment Terms:TT,Paypal,WU,Escrow
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Location:
Shenzhen Guangdong
Address:
Room 620 ,yutian building , song lin road , Futian district ,Shenzhen , China
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Product Details
NEW Photoresist Flow Meter IC Components SLQ-QT105
Tailored to the integration in demanding coating systems, the new
SLQ-QT105 is a semicon grade-sensor solution for flow rates below
120 ml/min of hydrocarbon based liquids like photoresists and
solvents. Based on Sensirion's proven thermal microsensor
technology, it opens new perspectives in terms of sensitivity,
reliability and speed. The short response time of the SLQ-QT105
allows the accurate monitoring of highly dynamic processes such as
fast dosing operations. Equipped with fittings for 4x3mm PFA
tubing, this reliable device works without any moving parts
measuring non-invasively through the wall of a straight flow path.
A smart digital interface and robust RS485 communication is offered
for long distance and bus capability.
Features
-For flow rates up to 120 ml/min (hydrocarbons)
-Highest sensitivity down to the lowest flow rates
-Fast response time down to 30 ms
-RS485 digital interface
-For photoresists and solvents
-Straight flow path, no moving parts
-Assured purity
-Superb chemical resistance, inert materials
-Wetted materials: PCTFE, PFA and quartz glass only
Applications
-High-end semiconductor process control
-Fast dosing operations
NEW Photoresist Flow Meter IC Components SLQ-QT105
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