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Ceramic Discs for Semiconductor and Liquid Crystal Manufacturing Machines
Product Description:
Manufacturing machines parts of semiconductors need to have
features of high rigidity, processing accuracy, seismic capacity,
heat resistance, heat conductivity efficiency, surface processing
accuracy, metal contamination, chemical resistance, gas resistance,
plasma resistance, insulation performance, electric permittivity,
dielectric loss tangent, volume resistivity, low dust generation
(particles), cost, etc.
Nishimura Advanced Ceramics proposes applying highly-pure Alumina
(Al2O3 purity 99.5% or more), Aluminum Nitride (ALN), and Yttria
(Y203), as those ceramics satisfying the above requirements.
Because of its features, those materials are used as a transfer arm, wafer stages, and so on. Those materials are also good compatibility with metallization.
Aluminum nitride is excellent in heat conductivity, heat radiation,
heat shock resistance, and electrical insulation. Furthermore, its
thermal expansion coefficient is similar to a silicon wafer.
Yttria is the material which has excellent plasma resistance.
Mingrui Ceramics specializes in technical ceramic manufacturing of semiconductor parts and components. Whether you need high volume production quantities or single piece prototpyes for your semiconductor ceramic part, we will work with you to make the highest quality, creative designs. Our speciality is for even the most complex semiconductor ceramic rods, wafer lift pin, tubes, diodes, connectors, rectifiers and more.
Industrial Ceramics include:
| Ceramic Machining Capabilities:
|
Our technical ceramic capabilities include precision grinding and lapping for high-performance semiconductor grade ceramic materials such as: aluminum oxide ceramic (99.5% or 99.8% alumina), silicon carbide (CVD, sintered, or hot pressed SiC), aluminum nitride (AlN), and electrostatic discharge safe (ESD) ceramics.
Technical ceramic materials offer:
Properties sheet of Alumina and zirconia :
Characteristics | Unit | 95 Al2O3 | 99 Al2O3 | ZrO2 |
Crystal Structure | - | hexagonal | hexagonal | tetragonal |
Color | - | white | ivory | white |
Density | g/cm3 | 3.65 | 3.88 | 5.95 |
Water Absorption | % | 0 | 0 | 0 |
Young's Modulus | Gpa | 280 | 350 | 205 |
Vickers Hardness | Gpa | 14 | 20 | 12 |
Flexural Strength | Mpa | 280 | 300 | 900 |
Compressive Strength | Mpa | 2000 | 2500 | 2200 |
Thermal Conductivity | W/(m·k) | 18-25 | 30 | 2.2 |
Thermal shock resistance | Δ(℃) | 220 | 180-200 | 280-350 |
Max. Working Temperature | ℃ | 1500 | 1700 | 850 |
Volume Resistivity | Ω·cm | >10^15 | >10^14 | >10^12 |
Dielectric Constant (1 MHz ) | - | 9.5 | 9.8 | 26 |
Dielectric Strength | kV/mm | 16 | 22 | - |
Mingrui Ceramics provide advanced ceramics on critical wear surfaces of valve plugs to maximize service life.
Company Introduction :
1. What kind of industry ceramics do you have?
We specialized in 95% 97% 99% alumina ceramic and zirconia ceramic parts.
2. What kind of molding method can you supply?
Dry Pressing, isostatic pressing, grouting, hot-chamber die casting, tape casting, injection molding, etc, injection molding and isostatic molding is the most commonly used.
3.What stabilizer do you use when processing?
Yttria stabilizer is the most commonly used in our industrial ceramic parts.
4.Can you produce free samples for me?
Yes usually, we can produce free samples for you but it is up to the product complexity .
5.What terms can you accept for payment?
T/T, L/C , Western union , Money Gram and Paypal is welcome , but paypal and western union only for small-sum payment.
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