High Precision Grating Ruler Reading Head Achieve Effective Resolution Of 20 nm
Brand Name:UNIMETRO
Model Number:RU2
Minimum Order Quantity:1
Place of Origin:Dongguan
Price:Discussible
Packaging Details:box
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Dongguan Guangdong China
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NO.4 Gangtou Hengcheng Road, Xin'an community, Chang'an Town, Dongguan City, China
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Product Details
High Precision Grating ruler reading head achieve effective resolution of 20 nm
Product Description
RU2 Series Grating ruler reading head
● RU2 grating ruler reading head is designed to provide feedback for high precision linear measurement. It adopts UNIMETRO' s most advanced single field scanning technology, advanced automatic gain and automatic deviation correction technology. It can read 20 MHI grating ruler with high precision and anti-pollution performance. It is suitable for high performance and high reliability applications requiring closed-loop and speed control, such as high precision machine tools and automatic deviation correction technology, High-speed automation equipment, etc.
Reference Data
High Precision Single Field Scanning Series Reader
● RU2 reading head adopts UNIMETRO 's most advanced large area single field scanning technology, automatic gain control technology and automatic deviation correction technology, which can effectively reduce the impact of pollution. The built-in real-speed ADC subdivision of reading head can provide greater bandwidth, and more effectively reduce subdivision noise and subdivision error.It can achieve an effective resolution of 20 nm under the condition of low position noise and smooth speed control, with built-in REF reference origin and limit output, and provides a standard differential TTL digital incremental interface. The multi-color LED is integrated on the reading head, which can indicate signal strength and facilitate installation.
| Environmental requirements | |
| working temperature | -10℃ ~ +70℃ |
| Working humidity | RH<95% (Non condensation) |
| Seal up | IP40 |
| Storage temperature | -20℃ ~ +85℃ |
| Storage humidity | RH<95% (Non condensation) |
Main Features
◆ Maximum resolution 50 nm.
◆ Strong anti-pollution ability: Large area single field scanning
technology, more than 100 grid lines scanning at the same time,
effectively reduce the impact of other pollutants such as dust.
◆ High bandwidth, low subdivision error: built-in high-speed ADC
and filter circuit, provide higher bandwidth, higher resolution,
higher dynamic response, lower subdivision error.
◆ Automatic benefit control, automatic deviation correction:
advanced automatic gain control, automatic deviation correction
circuit and algorithm, to provide more stable signal output.
Installation is also more convenient.
◆ Multicolor indicator indicates signal strength and installation
status.
◆ SinCos 1Vpp, Differential TTL Signal Interface.
◆ Built-in REF origin and limit signal.
| Dimension | L:36mm * W16.4mm * H14.3 |
| Weight | Reading Head:15g Cable:35g/m |
| Power | 5V±10% 150mA |
| Output signal | Differential TTL or SinCos 1Vpp, origin, limit, reading head ready |
| Connector | D-sub 15 Pin Male |
| Accuracy grade | ±5 um(RUS Grating ruler) |
| Resolution | Differential TTL 5um,1um,0.5um,0.2um,100nm,50nm,20nm (SinCos 1Vpp)20um |
| Electronic subdivision error | <40nm |
| Maximum speed | 12m/s(Relating to resolution and minimum clock frequency of counter) |
| Maximum acceleration | 35G |
| Reference origin | Magnetic switch at bottom of reading head |
| Limit switch | Magnetic switch at bottom of reading head |
| One-way Repetition Accuracy of Reference Origin | 1LSB |
Scanning Technology
RU2 reading head adopts LAMOTION advanced large area single field scanning technology. The scattered light emitted by the light source passes through the lens and adjusts to parallel beam. After filtering the surplus beam through the window on the grating, it illuminates on the grating ruler and reflects by the grating ruler to form bright and dark fringes. The grating on the window illuminates on the single field scanning sensor.
High Pollution Resistance of Single Field Scanning
Through LAIVIOTION Dalian Banyan optical test, when using RUS stainless steel grid ruler, the RU2 reading head is polluted by dust, ink and scratches similar to the figure above, the measurement accuracy is only affected by tens of nanometers, and the Lissajou figure of the signal is only affected by a little, there will be no DC deviation and unequal distortion of the amplitude. It will not cause the reading head to be unable to work.
The single-field scanning of RU2 reading head only outputs Sin+, Sin-, Cos+, Cos-signals on one sensor. Unlike four-field scanning, it requires four sensors to output signals. When the grid ruler is contaminated, the amplitude of the signal changes at the same time, which will not cause Lissajou pattern distortion.
Automatic Gain Control Technology
The RU2 reading head uses the most advanced automatic gain control technology of LAMOTION Dalian Banyan Optics. When the distance between the reading head and the grating ruler changes (mostly when the reading head is adjusted and installed), or when the speed of the reading head changes, the amplitude of the signal will change. The automatic gain control technology of the RU2 reading head can keep the amplitude of these signals stable all the time and ensure the output accuracy.
Detailed Images.
| Signal electrical parameters | ||
| Differential TTL | Signal location | 2 differential signals A and B |
| Reference origin signal | 1differential signals Z | |
| Pulse width 90° | ||
| Signal level | RS-422(TIA/EIA-422-B) | |
| Output high level ≥ 2.4V When the output current is 20 mA | ||
| Output low level ≤ 0.4V When the output current is 20 mA | ||
| Allowable load | Output current ≤ 30 mA | |
| Impedance 120ohm Between each pair of differential signals | ||
| SinCos 1Vpp | Signal location | Sin signal and Cos signal |
| Reference origin signal | 1differential signals REF | |
| Pulse width -18°~ -108° | ||
| Signal level | Signal level M 0.6V~1.2V Typical value 1Vpp | |
| Symmetry deviation | P-N | /2M ≤ 0.065 | ||
| Phase angle | φ1+φ2 | /2 90°±1°Electron angle | ||
| Allowable load | Output current ≤ 10 mA | |
| Impedance 120ohm Between each pair of differential signals | ||
| Limit | Signal type | Drain open circuit output |
| Allowable load | Input level 3.3V~24V | |
| Input current ≤20mA | ||
| Reader ready | Signal type | Drain open circuit output |
| Allowable load | Input level 3.3V~24V | |
| Input current ≤20mA | ||
PS:In order to ensure the phase of the origin signal, it may be necessary to adjust the origin magnet.
The Relation between Speed and Resolution and Frequency
| Output resolution | |||||||
1um | 0.5um | 0.2um | 0.1um | 50um | |||
| Counter Minimum clock frequency | 10M | 12M | 12M | 8M | 4M | 2M | Maximum speed |
| 5M | 12m/s | 10m/s | 4m/s | 2m/s | 1m/s | ||
| 2.5M | 10m/s | 5m/s | 2m/s | 1m/s | 0.5m/s | ||
| 1M | 4m/s | 2m/s | 0.8m/s | 0.4m/s | 0.2 | ||
Signal Connection
| Reading Head Interface Line Sequence | |||
| Pin number | Function | Pin number | Function |
| PIN 1 | Differential TTL A+ (Digital output) SinCos 1Vpp Sin+ (Analog output) | PIN 9 | Differential TTL A- (Digital output) SinCos 1Vpp Sin- (Analog output) |
| PIN 2 | Differential TTL A+ (Digital output) SinCos 1Vpp Sin+ (Analog output) | PIN 10 | Differential TTL B- (Digital output) SinCos 1Vpp Sin- (Analog output) |
| PIN 3 | Differential TTL Z+ (Digital output) SinCos 1Vpp Ref+ (Analog output) | PIN 11 | Differential TTL Z- (Digital output) SinCos 1Vpp Ref- (Analog output)) |
| PIN 4 | Empty | PIN 12 | Empty |
| PIN 5 | Reader ready | PIN 13 | Empty |
| PIN 6 | Limit | PIN 14 | +5V |
| PIN 7 | +5V | PIN 15 | 0V |
| PIN 8 | 0V,Inner shielding (need to be connected to 0V with PIN15 to enhance anti-jamming performance) | ||
Signal Meaning
The meaning of reader ready and limit signal can be judged concretely by referring to the system indicator.
| Reading Head Interface Line Sequence | |||
| Pin number | Function | Pin number | Function |
| PIN 1 | Differential TTL A+ (Digital output) SinCos 1Vpp Sin+ (Analog output) | PIN 9 | Differential TTL A- (Digital output) SinCos 1Vpp Sin- (Analog output) |
| PIN 2 | Differential TTL A+ (Digital output) SinCos 1Vpp Sin+ (Analog output) | PIN 10 | Differential TTL B- (Digital output) SinCos 1Vpp Sin- (Analog output) |
| PIN 3 | Differential TTL Z+ (Digital output) SinCos 1Vpp Ref+ (Analog output) | PIN 11 | Differential TTL Z- (Digital output) SinCos 1Vpp Ref- (Analog output)) |
| PIN 4 | Empty | PIN 12 | Empty |
| PIN 5 | Reader ready | PIN 13 | Empty |
| PIN 6 | Limit | PIN 14 | +5V |
| PIN 7 | +5V | PIN 15 | 0V |
| PIN 8 | 0V,Inner shielding (need to be connected to 0V with PIN15 to enhance anti-jamming performance) | ||
System Indicator
The RU2 reading head has built-in multi-color indicator light, which can indicate the current signal, origin and limit status, and can assist the installation and adjustment of the reading head.
| Reader ready, limit signal state meaning | ||
| Signal Condition | Reader ready | Limit |
| Drain open | Signal line disconnection | Signal line disconnection |
| Low Intensity of Reading Head Signal | Detection Limit | |
| Reading head overspeed | ||
| Abnormal power supply of reading head | ||
| Drain closure | Reading head works normally | Reading head works normally |
| Other Functions of Reading Head Indicator | |
| Red lights on for 0.5 seconds | Origin position detected |
| Red light flashes twice | Origin phase error, need to adjust the phase The speed of origin detection is too fast. |
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High Precision Grating Ruler Reading Head Achieve Effective Resolution Of 20 nm
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