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Diamond Like Carbon DLC PVD Vacuum Coating Machine / Magnetron Sputtering Coating Machine

Diamond Like Carbon DLC PVD Vacuum Coating Machine / Magnetron Sputtering Coating Machine

Brand Name:ROYAL
Certification:ISO, CE, UL standard
Model Number:RTAS950
Minimum Order Quantity:1 set
Delivery Time:12 weeks
Payment Terms:L/C, D/A, D/P, T/T
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Address: 819# SONGWEI ROAD (N.) SONGJIANG INDUSTRIAL ZONE, SHANG HAI, CHINA 201613
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Product Details

DLC hard coating machine / DLC PECVD coating equipment / Diamond like Carbon vacuum PVD coating system


DLC coatings: self-lubricating and anti-friction diamond-like coatings

Diamond-like-Carbon coatings are used in demanding automotive, non-ferrous material machining and industrial engineering environments where component surfaces are subjected to high contact pressure, intermittent lubrication or dry sliding and rolling environments where severe abrasive and adhesive wear conditions exist. DLC coatings are also commonly applied onto various medical and dental instruments and implants to provide a dark black, anti-reflective and bio-compatible surface with enhanced tribological protection properties.

This machine is suitable to the industrial production vacuum coating system. It equips a big size plain arc ion evaporation source and can deposite high performance hard metal film by arc evaporation technology, such as TiN, TiCN,AlTiN and all kinds of other special film according to customer’s requirements.
DLC coating (diamond-like carbon) is the combination of diamond (SP3) and graphite (SP2). The physical and chemical properties of DLC are intermediate to that of diamond and graphite


DLC coatings properties

  • Strong adhesion of the deposited films to the surface;
  • Hardness of the coating comparable to diamond hardness;
  • Durability;
  • Low coefficient of friction;
  • Chemical stability;
  • Ecological cleanliness;
  • Biological compatibility;
  • Transparency in the infra-red band of the spectrum;
  • High heat conductivity;
  • Corrosion resistance;
  • High electrical resistance

DLC coatings on sealing parts:



DLC Thin Film Coating Machine Specifications


MODELRTSP800
TECHNOLOGYPECVD process- magnetron sputtering + ion source
CHAMBER MATERIALStainless Steel (S304)
CHAMBER SIZEΦ800*800mm (H)
CHAMBER TYPERegular octahedron chamber, 2-doors
ROTATION RACK & JIG SYSTEM6 (8)satellite, Max. weight: 400kgs
POWER SUPPLIESQty. of Sputtering: 2*24 KW Bias of Power Supply: 1*24W AE power supply for option Ion Source Power supply 2 sets, AE power supply for option
DEPOSITION MATERIALCr/C
DEPOSITION SOURCE

2 pairs (4 pieces) Sputtering Cathodes + 2 Ion Source Coating Area: Dia800mm*H550mm;

Uniformity Area: ±10~15%

CONTROLPLC(Programmable Logic Controller) + Touch Screen ( manual+ auto+ semi-auto operation models)
PUMP SYSTEMRotary Vane Pump: SV300B - 1 set (Leybold)
Roots Pump: WAU1001 - 1 set (Leybold)
Holding Pump: D60C-1set- (Leybold)
Magnetric Rotor Suspension Molecular Pump: MAG2200 - 2 sets (Leybold)
GAS MASS FLOW CONTROLLER3 channels, Made in America (MKS brand)
VACUUM GAUGEModel: ZDF-X-LE, Made in China
Linear Ion Source2 pieces Pre-treating, plasma cleaning + assisted deposition
SAFETY SYSTEMNumerous safety interlocks to protect operators and equipment
HEATINGHeaters: 20KW. Max. temp.: 400℃
COOLINGIndustrial Chiller (Cold Water)
POWER MAX.100KW (Approx.)
AVERAGE POWER CONSUMPTION45 KW (Approx.)
GROSS WEIGHTT (Approx.)
FOOT PRINT( L*W*H) 4000*4000 *4000 MM
POWER ELECTRICALAC 380V/3 phases/50HZ


Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.

China Diamond Like Carbon DLC PVD Vacuum Coating Machine / Magnetron Sputtering Coating Machine supplier

Diamond Like Carbon DLC PVD Vacuum Coating Machine / Magnetron Sputtering Coating Machine

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