Alumina Advanced Technical Ceramics High Stiffness Ceramic Vacuum Grip Device

Ceramic Vacuum Grip Device for Automation Solar Cell Wafer Transfer System

Key word: Ceramic Vacuum Grip Device

Ceramic vacuum chuck includes a table, table is provided with a concave body; the base is arranged on the concave table, split base and the table is located in the same plane; the sucker matrix layer is arranged on the table and split on the base substrate layer includes a first suction portion having a first radius and the second part is second of the radius and the radius of the first radius of less than second; working layer is arranged on the sucking disc on the first portion; the first outer ring structure is arranged on the table on the edge of the outer ring; and the first clamping structure, and second sets of outer ring structure arranged on the chuck layer and the base layer of the sucker; the concave platform is arranged in the vacuum through joint work station connecting hole, split base is provided with a corresponding vacuum joint first vacuum hole of the connecting hole, sucker matrix layer is provided with a plurality of second vacuum suction through the hole of the base layer. This scheme improves the stability and efficiency of the equipment.

vacuum chuck; vacuum grip device
desk; staging; gallery; operating floor; operating platform
base; pedestal; foundation; lampstand; bed
sucker; trochal disc; sucking disc; acetabulum; acetabula

Ceramic Vacuum Grip Device is a special tool used in the process of semiconductor production for adsorption and load. It is applied to thinning, dicing and other processes. The sucker produced by our company can be matched with Japanese, German and domestic equipment, and has superior cost performance advantages.

Characteristics of Ceramic Vacuum Grip Device

It has excellent chemical stability and does not react with any substance;

Good flatness and parallelism;

It has the characteristics of uniform structure, high strength and durability;

The pores are uniform and the adsorption force is even;

Easy to change, short processing cycle;

It can be customized according to customer requirements.

Mingrui offers Ceramic Vacuum Grip Device for improved yield management in semiconductor wafer processing. Low-surface-contact configurations reduce the risk of back-side particles, which have negative impact on wafer geometry in precision applications. The company offers:

• Extreme wear resistance
• Large size capability - 300mm and beyond
• Low thermal expansion
• High stiffness
• Exceptionally lightweight
• Mirror polish
• Ultra-flat capabilities

Heat-resistant, non-damaging handling arms provide high functionality.

A heat-resistant, damageless handling arm. We can apply coatings such as Diamond Like Carbon (DLC) to the ceramic surface for enhanced functionality that mitigates damage to wafers / glass panels and prevents contamination from diffusing.

Products : Ceramic Chucks and wafer end-effectors

Ceramic Vacuum Grip Device and end-effectors are used to manipulate and carry silicon wafers

through the whole production process. The chemical inertness of ceramics allows those components to be contamination-free for the wafer in particular in chemical wet etching baths.
These items enable the handling of large-size wafers and can be designed with vacuum channels in order to hold the part.

Applications Ceramic components can be used in the following semiconductor process equipment :

• Deposition and ion implant machines
• Chemical wet etching equipment
• Failure-analysis machines
• Electrostatic chucks

Mingrui Ceramic can offer the following products :

• Insulator plates for electrostatic chucks (E-chucks)
• Base plates for thermo chucks
• End-effectors

The most commonly used ceramic materials are :

• Alumina – or aluminium oxide – 95 % alumina ceramic minimum
• zirconia

Ceramic wafer suction plate play a key role on the wafer transfer equipment as automatic wafer unloader and wafer loader machinery .

LPCVD ceramic wafer vaccum suction plate are mainly used in the solar semiconductor thin film making , like the diffussion wafer load and unload machine . It used for wafer loading and unloading .

Heat-resistant, non-damaging handling arms provide high functionality.

A heat-resistant, damageless handling arm. We can apply coatings such as Diamond Like Carbon (DLC) to the ceramic surface for enhanced functionality that mitigates damage to wafers / glass panels and prevents contamination from diffusing.

Mingrui Manufacture zirconia Ceramic wafer boat used on automatic wafer handling system diffusion furnace . As zirconia ceramic with the charactheristic of wear resistant , high temperature resistant,

ceramic wafer boat is a good choice for wafter carrier .

Integrated wafer loading& unloading, unloading the diffused wafers from the ceramic wafer boat

Technical Characteristics

·With continuous wafer loading& unloading can guarantee the continuous production. Or be used only for wafer loading or unloading is also available.

·With perfect detection and alarm system which guarantees the stable and automatic operation.

·With circulation method of the cassette baseplate which reduce the labor intensity.

·Modular control program structure, highly repeatable and readable, which is convenient for function expansion in future and maintenance;

·With recipe data design which enables the equipment to work with various kinds of ceramic wafer boat with different accuracy, while running equipment will follow the boat No. automatically and retrieve the corresponding recipe data without human intervention.

Alumina & Zirconia ceramic date sheet :

Industrial Ceramic Intriduction

Aluminium Oxide, Al2O3 is the most widely applied and cost effective technical ceramic material. It offers a combination of superior mechanical strength and electrical properties, wear resistance and corrosion resistance. The maximum working temperature is up to 1700 °C with relatively high thermal conductivity. It is also an electrically insulating material with a high electrical resistivity. The good corrosion resistance makes it insoluble in water and slightly soluble in strong acid and alkaline solution.

Company Introduction
Mingrui ceramic manufacture and provides alumina ceramic components for a wide range of application like Mechanical Equipment, Electronic & Electrical, Oil Drilling, Medical, Chemical Industry etc. According to actual application and customer's requirement, the purities vary from 95%-99.7% and the forming methods will be different. The forming methods applied in our plant include dry pressing, isostatic pressing, injection moulding, extrusion moulding. With experienced engineers and talented workers, we are confident to offer high quality, high precision, complex components for customers worldwide.

Mingrui Ceramics has years of experience designing and developing technical ceramic solutions for a wide variety of applications and industries. High Temperature Refractory Machining Ceramic Parts Laser Equipment. We offer this expertise to all of our customers to ensure the best design and materials are chosen for their specific application and needs. High Temperature Refractory Machining Ceramic Parts Laser Equipment, Typically, our custom technical ceramic components and parts we supply are used for one of three main reasons:

FAQ

Q: Are you trading company or manufacturer ?

A: We are factory.

Q: How long is your delivery time?

A: Generally it is 5-10 days if the goods are in stock. or it is 15-20 days if the goods are not in stock, it is according to quantity.

Q: Do you provide samples ? is it free or extra ?

A: Yes, we could offer the sample for free charge but do not pay the cost of freight.

Q: What is your terms of payment ?

A: Payment<=1000USD, 100% in advance. Payment>=1000USD, 30% T/T in advance ,balance before shippment.

If you have any other question, pls feel free to contact us .