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SEM-EM8100F , Resolution 1nm@30kV(SE) , Magnification 15x-800,000x
KYKY TECHNOLOGY CO., LTD., founded in 1958, invented scanning electron microscope in China.KYKY has been dedicated to providing comprehensive vacuum solutions to the partners all over the world in the last half-century.
It is the Upgrade version of EM8000, with upgraded E-Beam tube
acceleration, varies vacuum mode, available to observe
non-conducting sample at low voltage without sputtering, easy,
convenient and friendly operation system, multiple extension
remodel plan. It also the first FEG SEM which has the resolution at
1nm(30kV).
Advantages:
1,Schittky electron gun, high brightness, good monochromaticity, small beam spot, long life duration.
2,With E-beam tube accelaration, optional stage deceleration
3,Stable beam current, low energy spread
4,Non- conducting sample observe without sputtering in low voltage
5,Easy, convenient and friendly operation interface
6,Huge 5 axes motorized stage
Specifications:
Configuration | ||||
Resolution | 1nm@30kV(SE) | |||
3nm@1Kv(SE) | ||||
2.5nm@30kV(BSE) | ||||
Magnification | 15x-800,000x | |||
Accelerating Voltage | 0-30kV continuous&adjustable | |||
Electron Gun | Schottky field emission gun | |||
Cathode Emitter | Tungsten mono-crystal | |||
Five Axes Eucentric Auto Stage | X:0~150mm | |||
Y:0~150mm | ||||
Z:0~60mm | ||||
R:360° | ||||
T:-5°~75° | ||||
Max Specimen | 320mm | |||
L*W*H | 342mm*324mm*320mm(inside chamber size) |